Formation of Buried Nitride Layers in (110) Silicon

MRS Proceedings 1987 / 1 Vol. 107

Formation of Buried Nitride Layers in (110) Silicon

Datye, Abhaya K., Kaushik, Vidya S., Kendall, Don L., Martinez-Tovar, Bernardo, Myers, David R.
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Volume:
107
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-107-461
Date:
January, 1987
File:
PDF, 1.16 MB
english, 1987
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