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Dielectric Charging in Low Temperature Silicon Nitride for RF-MEMS Capacitive Switches
Daigler, Richard, Papaioannou, George, Papandreou, Eleni, Papapolymerou, JohnVolume:
1075
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1075-j05-05
Date:
January, 2008
File:
PDF, 604 KB
english, 2008