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Effect Of Trapping On Dielectric Conduction Mechanisms Of ULK/Cu Interconnects
Verrière, Virginie, Guedj, Cyril, Roy, David, Blonkowski, Serge, Sylvestre, AlainVolume:
1156
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1156-d01-04
Date:
January, 2009
File:
PDF, 665 KB
english, 2009