Growth of CoSi2/Si Multilayer Structures

MRS Proceedings 1988 / 1 Vol. 116

Growth of CoSi2/Si Multilayer Structures

Ljni, T. L., Grunthaner, P. J., Schowengerdt, F. D., Fathauer, R W., Mazur, J. H., Chang, K T., Hashimoto, S., Xia, Q.
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Volume:
116
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-116-431
Date:
January, 1988
File:
PDF, 2.74 MB
english, 1988
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