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Deposition Chemistry and Structure of Amorphous Fluorinated Silicon Nitride
Petrich, Mark A., Livengood, Rhett E., Hess, Dennis W., Reimer, Jeffrey A.Volume:
118
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-118-67
Date:
January, 1988
File:
PDF, 456 KB
english, 1988