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Stress Modification in Tungsten Films Deposited by Ion-Assisted Evaporation
Roy, R. A., Petkie, R., Yee, D. S., Karasinski, J., Boulding, A.Volume:
128
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-128-17
Date:
January, 1988
File:
PDF, 393 KB
english, 1988