Study of Enhanced Solid Phase Epitaxy of Amorphous Silicon with Low Concentrations of Implanted Phosphorous
Jeon, Young- Jin, Park, Won Woo, Becker, M. F., Walser, Rodger. M.Том:
128
Мова:
english
Журнал:
MRS Proceedings
DOI:
10.1557/proc-128-551
Date:
January, 1988
Файл:
PDF, 305 KB
english, 1988