A Comparison of Low Energy BF2 Implantation in Si and Ge...

MRS Proceedings 1988 / 1 Vol. 128

A Comparison of Low Energy BF2 Implantation in Si and Ge Preamorphized Silicon

Ruggles, Gary A., Hong, Shin-Nam, Wortman, Jimmie J., Ozturk, Mehmet, Myers, Edward R., Hren, John J., Fair, Richard B.
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Volume:
128
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-128-611
Date:
January, 1988
File:
PDF, 1.28 MB
english, 1988
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