Atomic Profiles and Electrical Characteristics of Very High...

MRS Proceedings 1988 / 1 Vol. 128

Atomic Profiles and Electrical Characteristics of Very High Energy (8–20 MeV) Si Implants in GaAs

Thompson, Phillip E., Dietrich, Harry B., Eridon, James M., Gresko, Thomas
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Volume:
128
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-128-665
Date:
January, 1988
File:
PDF, 312 KB
english, 1988
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