Mechanistic Study of Laser Chemical Vapor Deposition of Trimethylindium
Kawasaki, Masahiro, Kasatani, Kazuo, Sato, Akihiko, Sato, Hiroyasu, Nishi, NobuyukiVolume:
129
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-129-69
Date:
January, 1988
File:
PDF, 225 KB
english, 1988