Rapid Thermal Annealing of Silicon Using an Ultrahigh Power...

MRS Proceedings 1982 / 1 Vol. 13

Rapid Thermal Annealing of Silicon Using an Ultrahigh Power Arc Lamp

Hodgson, R. T., Baglin, J. E. E., Michel, A. E., Mader, S., Gelpey, J. C.
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Volume:
13
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-13-355
Date:
January, 1982
File:
PDF, 687 KB
english, 1982
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