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Intrinsic Stress in a-Germanium Films Deposited by RF-Magnetron Sputtering
Fahnline, D., Yang, B., Vedam, K., Messier, R., Pilione, L.Volume:
130
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-130-355
Date:
January, 1988
File:
PDF, 258 KB
english, 1988