Adsorption of Silicon Tetrachloride on Si(111) 7×7

MRS Proceedings 1988 / 1 Vol. 131

Adsorption of Silicon Tetrachloride on Si(111) 7×7

Gupta, P., Coon, P. A., Koehler, B. G., George, S. M.
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Volume:
131
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-131-197
Date:
January, 1988
File:
PDF, 251 KB
english, 1988
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