Arsenic Diffusion and Precipitation at AsSG/Si Interface

MRS Proceedings 1988 / 1 Vol. 138

Arsenic Diffusion and Precipitation at AsSG/Si Interface

Tsunashima, Yoshitaka, Kashio, Takako, Kawaguchi, Hideichi, Onga, Shinji, Yamabe, Kikuo
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Volume:
138
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-138-569
Date:
January, 1988
File:
PDF, 320 KB
english, 1988
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