Reduction of Toxic Gas Emissions During Gas Cabinet Manifold Vent Purge Cycles Using a Novel Scrubbing Material.
Luxon, Bruce A., Vaughan, V. R, Mcmanus, J. V., Tom, G. M.Volume:
145
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-145-199
Date:
January, 1989
File:
PDF, 742 KB
english, 1989