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Rapid Thermal Annealing of Double Polysilicon Bipolar Transistors
Patton, Evan E., Yamaguchi, Tadanori, Lee, June, Tang, Alex, Yu, Y.-C. S.Volume:
146
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-146-179
Date:
January, 1989
File:
PDF, 470 KB
english, 1989