Integrated Processinyg of Silicided Shallow Junctions using...

MRS Proceedings 1989 / 1 Vol. 146

Integrated Processinyg of Silicided Shallow Junctions using Rapid Thermal Annealing Prior to Dopant Activation

Rubin, Leonard, Herbots, Nicole, Gutierrez, JoAnne, Hoffman, David, Ma, Di
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Volume:
146
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-146-191
Date:
January, 1989
File:
PDF, 1.10 MB
english, 1989
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