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Formation of Ultrathin Stacked Dielectrics Prepared by In-Situ Multi-Step RTP-CVD
Ting, W., Lin, S. N., Kwong, D. L.Volume:
146
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-146-351
Date:
January, 1989
File:
PDF, 308 KB
english, 1989