Damage Removal of Low Energy Ion Implanted BF2 Layers in...

MRS Proceedings 1989 / 1 Vol. 147

Damage Removal of Low Energy Ion Implanted BF2 Layers in Silicon

Myers, E., Hren, J. J.
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Volume:
147
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-147-27
Date:
January, 1989
File:
PDF, 1.89 MB
english, 1989
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