Detailed Study of Ion Bombardment in Rf Glow Discharge Deposition Systems: The Role of Helium Dilution
Cabarrocas, P. Roca IVolume:
149
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-149-33
Date:
January, 1989
File:
PDF, 431 KB
english, 1989