Detailed Study of Ion Bombardment in Rf Glow Discharge...

Detailed Study of Ion Bombardment in Rf Glow Discharge Deposition Systems: The Role of Helium Dilution

Cabarrocas, P. Roca I
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Volume:
149
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-149-33
Date:
January, 1989
File:
PDF, 431 KB
english, 1989
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