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Hydrogenated Amorphous Silicon Films Prepared by Mercury Sensitized Photochemical Vapor Deposition
Kamimura, Takaaki, Nozaki, Hidetoshi, Sakuma, Naoshi, Nakajima, Mitsuo, Ito, HiroshiVolume:
149
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-149-51
Date:
January, 1989
File:
PDF, 298 KB
english, 1989