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Gettering of Cu at Buried Damage Layers Made by Si Self Implantation
Liefting, J.R., Schreutelkamp, R.J., Lu, W.X., Saris, F.W.Volume:
157
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-157-641
Date:
January, 1989
File:
PDF, 364 KB
english, 1989