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Novel Photoimaging Schemes at Polymer Surfaces: Their Role in High Resolution Lithography
Taylor, Gary N., Nalamasu, Omkaram, Hutton, Richard S.Volume:
158
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-158-3
Date:
January, 1989
File:
PDF, 2.84 MB
english, 1989