Angle Resolved XPS Analysis of Surface Region Defects in...

MRS Proceedings 1989 / 1 Vol. 163

Angle Resolved XPS Analysis of Surface Region Defects in Rapid Thermal Annealed Antimony Implanted Silicon

Kumar, S.N., Chaussemy, G., Laugier, A., Canut, B., Charbonnier, M.
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Volume:
163
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-163-927
Date:
January, 1989
File:
PDF, 362 KB
english, 1989
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