Electrical Properties of Sipos Films Deposited on...

MRS Proceedings 1989 / 1 Vol. 164

Electrical Properties of Sipos Films Deposited on Crystalline Silicon

Chuang, Tien-Min, Rose, Kenneth, Gutmann, Ronald J.
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Volume:
164
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-164-383
Date:
January, 1989
File:
PDF, 306 KB
english, 1989
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