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Chemical Vapor Deposition of Niobium Carbide using a Novel Organometallic Precursor.
Stupik, Paul D., Cheatham, Linda K., Graham, John J., Barron, Andrew R.Volume:
168
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-168-363
Date:
January, 1989
File:
PDF, 176 KB
english, 1989