Low-temperature Chemical Vapor Deposition of Rhodium and...

MRS Proceedings 1989 / 1 Vol. 168

Low-temperature Chemical Vapor Deposition of Rhodium and Iridium thin Films

Smith, David C., Pattillo, Steve G., Elliott, Norman E., Zocco, Thomas G., Burns, Carol J., Laia, Joseph R., Sattelberger, Alfred P.
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Volume:
168
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-168-369
Date:
January, 1989
File:
PDF, 1.04 MB
english, 1989
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