Formation and Crystallization of Amorphous Silicides at the...

MRS Proceedings 1982 / 1 Vol. 18

Formation and Crystallization of Amorphous Silicides at the Interface Between Thin Metal and Amorphous Silicon Films

Herd, S. R., Ahn, K. Y., Tu, K. N.
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Volume:
18
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-18-197
Date:
January, 1982
File:
PDF, 6.33 MB
english, 1982
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