Sol-Gel Coatings on Acoustic Wave Devices: Thin Film Characterization and Chemical Sensor Development
Frye, Gregory C., Jeffrey Brinker, C., Ricco, Antonio J., Martin, Stephen J., Hilliard, Janice, Doughty, Daniel H.Volume:
180
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-180-583
Date:
January, 1990
File:
PDF, 739 KB
english, 1990