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Ion-Implantation Effects on Spin-on-Glass (Sol-Gel) SiO2 Films
Shacham-Diamand, Y., Moriya, N., Kalish, R.Volume:
180
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-180-703
Date:
January, 1990
File:
PDF, 386 KB
english, 1990