Modified Line-of-Sight Model for Deposition of Tungsten...

Modified Line-of-Sight Model for Deposition of Tungsten Silicide Barrier Layers

Cale, Timothy S., Raupp, Gregory B.
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Volume:
181
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-181-603
Date:
January, 1990
File:
PDF, 344 KB
english, 1990
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