Room Temperature Oxidation of Silicon Catalyzed by Cu3Si

MRS Proceedings 1990 / 1 Vol. 187

Room Temperature Oxidation of Silicon Catalyzed by Cu3Si

Harper, J.M.E., Charai, A., Stolt, L., d'Heurle, F.M., Fryer, P.M.
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Volume:
187
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-187-107
Date:
January, 1990
File:
PDF, 1.51 MB
english, 1990
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