Mechanical Properties of Carbon Films for Thin Film Disks

MRS Proceedings 1990 / 1 Vol. 188

Mechanical Properties of Carbon Films for Thin Film Disks

White, Richard L., Doerner, Mary F., Walker, George W.
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Volume:
188
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-188-213
Date:
January, 1990
File:
PDF, 670 KB
english, 1990
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