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Measurement of Stresses in Thin Films Using Holographic Interferometry: Dependence on Atmospheric Conditions
Maden, Michele A., Tong, Kun, Farris, Richard J.Volume:
188
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-188-29
Date:
January, 1990
File:
PDF, 1.19 MB
english, 1990