Microwave Processing of Silicon Nitride

MRS Proceedings 1990 / 1 Vol. 189

Microwave Processing of Silicon Nitride

Tiegs, T. N., Kiggans, J. O., Kimrey, H. D.
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Volume:
189
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-189-267
Date:
January, 1990
File:
PDF, 1.12 MB
english, 1990
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