Hydrogenated Silicon Films Prepared by Remote Plasma CVD

MRS Proceedings 1990 / 1 Vol. 192

Hydrogenated Silicon Films Prepared by Remote Plasma CVD

Kim, Sung Chul, Lee, Seung Kyu, Soe, Sung Mo, Koh, Sung Ok, Ihm, Sung Shil, Jun, Jung Mok, Kim, Tae Gon, Chung, Moon Hyun, Lee, Kyung Ha, Song, Hyon Kynn, Jang, Jin, Hwang, Jung Tae, Chung, Kwan Soo
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Volume:
192
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-192-577
Date:
January, 1990
File:
PDF, 360 KB
english, 1990
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