Characterization of a-Si:H,Cl and a-Sic:H Films Prepared by Electron Cyclotron Resonance Plasma
Gangopadhyay, S., Trost, T., Kristiansen, M., Young, C., Zheng, P., Palsule, C., Pleil, M.Volume:
192
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-192-627
Date:
January, 1990
File:
PDF, 326 KB
english, 1990