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Study of Diffusion Barriers for PZT Deposited on Si for Non-Volatile Random-Access Memory Technology
Parikh, Nalin R., Stephen, J. Todd, Swanson, Max L., Myers, Edward R.Volume:
200
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-200-193
Date:
January, 1990
File:
PDF, 327 KB
english, 1990