Improvement of Gaas Crystal Quality on Si Grown by Mocvd...

Improvement of Gaas Crystal Quality on Si Grown by Mocvd Through Two-Dimensional-Like Nucleation with Low Temperature in Situ Hydrogen/Arsine Plasma Cleaning

Yoon, Euijoon, Reif, Rafael
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Volume:
202
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-202-37
Date:
January, 1990
File:
PDF, 1.51 MB
english, 1990
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