Material Characterization of Low-Temperature Silicon...

Material Characterization of Low-Temperature Silicon Epitaxial Growth on Patterned Oxidized Wafers by ULPCVD From SiH4/SiF4/H2

Yew, Tri-Rung, Reif, Rafael Reif
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
202
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-202-389
Date:
January, 1990
File:
PDF, 2.08 MB
english, 1990
Conversion to is in progress
Conversion to is failed