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Hardness and Adhesion Measurements of Copper Metallizations by a Continuous Indentation Approach
Lafontaine, W.R., Li, Che-YuVolume:
203
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-203-163
Date:
January, 1990
File:
PDF, 232 KB
english, 1990