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Decomposition Mechanisms of Antimony Source Compounds for Organometallic Vapor-Phase Epitaxy
Larsen, Cory A., Gedridge, Robert W., Li, Shin Hwa, Stringfellow, Gerald B.Volume:
204
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-204-129
Date:
January, 1990
File:
PDF, 372 KB
english, 1990