The Deposition of Borophosphosilicate Glass Films by LPCVD Using 2,4,6,8 Tetramethylcyclotetrasiloxane
O'Meara, David L., Hochberg, Arthur K.Volume:
204
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-204-533
Date:
January, 1990
File:
PDF, 307 KB
english, 1990