Preparation of High-Quality a-SiGe:H films with Low...

MRS Proceedings 1991 / 1 Vol. 219

Preparation of High-Quality a-SiGe:H films with Low Impurity Oncentration by the Hydrogen Dilution Method

Sayama, Katsunobu, Haku, Hisao, Dohjoh, Hiroshi, Isomura, Masao, Nakamura, Noboru, Tsuda, Shinya, Kishi, Yasuo, Nakano, Shouichi, Kuwano, Yukinori

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Volume:

219

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-219-691

Date:

January, 1991

File:

PDF, 338 KB

english, 1991

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