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Growth of A β-SiC Filli on a Si Substrate by a Direct Carbonization Method
Hirano, Yasuaki, Inada, TarohVolume:
220
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-220-569
Date:
January, 1991
File:
PDF, 2.11 MB
english, 1991