Structural Characterization of Si1-xGex Multilayer Growth...

MRS Proceedings 1991 / 1 Vol. 221

Structural Characterization of Si1-xGex Multilayer Growth On Patterned Substrates by Very-Low-Pressure Cvd

Tsai, Julie A., Jang, Syun-Ming, Tsai, Curtis, Reif, Rafael
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Volume:
221
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-221-369
Date:
January, 1991
File:
PDF, 1.81 MB
english, 1991
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