Internal Stress Development In Spin Coated Polyimide Films

MRS Proceedings 1991 / 1 Vol. 227

Internal Stress Development In Spin Coated Polyimide Films

Pottiger, Michael T., Coburn, John
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Volume:
227
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-227-187
Date:
January, 1991
File:
PDF, 380 KB
english, 1991
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