Protonation Effects On PPQ Polymer During HF Lift-Off Process Used In Multichip Module Fabrication.
Templier, François, Torres, J., Clarisse, C., Palleau, J.Volume:
227
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-227-273
Date:
January, 1991
File:
PDF, 299 KB
english, 1991