Effects of Heating Samples on the Extended Defect...

MRS Proceedings 1983 / 1 Vol. 23

Effects of Heating Samples on the Extended Defect Generation During Pulsed Electron Beam Annealing of Silicon

Pitaval, M., Ambri, M., Tholomier, M., Barbier, D., Chemisky, G., Laugier, A.
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Volume:
23
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-23-363
Date:
January, 1983
File:
PDF, 2.37 MB
english, 1983
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