![](/img/cover-not-exists.png)
Effects of Heating Samples on the Extended Defect Generation During Pulsed Electron Beam Annealing of Silicon
Pitaval, M., Ambri, M., Tholomier, M., Barbier, D., Chemisky, G., Laugier, A.Volume:
23
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-23-363
Date:
January, 1983
File:
PDF, 2.37 MB
english, 1983