Effect of Processing Conditions on the Surface Morphology...

Effect of Processing Conditions on the Surface Morphology of thin Polysilicon Films Used for Dram Cell Capacitors

Mathews, Viju K.
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Volume:
230
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-230-207
Date:
January, 1992
File:
PDF, 3.38 MB
english, 1992
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